Precise Positioning Control by a Hybrid Transducer Type Ultrasonic Motor
نویسندگان
چکیده
منابع مشابه
Adaptive positioning control of an ultrasonic linear motor system
A 3PRR parallel precision positioning system, driven by three ultrasonic linear motors, was designed for use as the object stage of a scanning electron microscope (SEM). To improve the tracking accuracy of the parallel platform, the positioning control algorithms for the drive joints needed to be studied. The deadzone phenomenon caused by static friction reduces the trajectory tracking accuracy...
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The development and control of XY stage driven by ultrasonic linear motor is presented. In this paper, the stage is driven by the hybrid-bolt clamped Langevin-type (Hybrid BLT) ultrasonic motor which consists of a longitudinal and a lateral PZT. The hybrid BLT is excited by its matched natural frequency without a discordance between natural frequency of a 3rd longitudinal mode and a 6th lateral...
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The thin-disc piezoceramic-driving ultrasonic actuator dedicated to a stepping ultrasonic motor is proposed. The mechanical hysteresis and dead-zone phenomena are automatically compensated by a closed loop servo control, i.e. Fuzzy Sliding-Mode Control (FSMC), for position tracking. The controller design of FSMC has syncretized the fuzzy reasoning and sliding mode control with robust stability ...
متن کاملActuating Mechanism and Design of a Cylindrical Traveling Wave Ultrasonic Motor Using Cantilever Type Composite Transducer
BACKGROUND Ultrasonic motors (USM) are based on the concept of driving the rotor by a mechanical vibration excited on the stator via piezoelectric effect. USM exhibit merits such as simple structure, quick response, quiet operation, self-locking when power off, nonelectromagnetic radiation and higher position accuracy. PRINCIPAL FINDINGS A cylindrical type traveling wave ultrasonic motor usin...
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A hybrid longitudinal-torsional ultrasonic transducer is designed and fabricated in this research. The design of the transducer was performed using the FE method with ABAQUS software, with the aim of combining the longitudinal and torsional vibration modes. The transducer horn is then fabricated using a 4-axis milling machine. The PZT stacks are employed in order to excite the transducer. The t...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Electronics, Information and Systems
سال: 1991
ISSN: 0385-4221,1348-8155
DOI: 10.1541/ieejeiss1987.111.9_462